AIN Ceramic Heater

AIN Ceramic Heater

Aluminum nitride is a multifunctional material most commonly used in scenarios that require high thermal conductivity and electrical insulation. This unique ability makes AIN an ideal choice for fast heating and heat dissipation. Such as aluminum nitride ceramic heaters, aluminum nitride ceramic wafer trays/ceramic chuck table, etc.

Application

Semi-conductor: ESC, etch, CVD, polishing machine;
Medical Devices: heating and atomization;
Other: used in other scenarios that require fast heating rate and good temperature uniformity.

Thermal conductivity: 10 times compare to alumina ceramics. Fast heating rate: can reach 600.C within 6 seconds at 25.c ambient temperature. With good temperature uniformity:the temperature difference is within ±5.
Strength:ftexural Strength 310-350 MPa. Hardness: HRA 89. Volume Resistivity: > 1013 O.cm.
Stability: the melting point of aluminum nitride ceramics is 2450.C, and it has good stability in high temperature non oxidizing atmospheres within 2000.
Excellent dielectric constant and low dielectric loss.